Samsung Electronics Co., Ltd.

Lg Electronics Inc.

Yoonmi Lee

Bum-Soo Kim

Kyoungsil Park

JungDae Park

Young Hoon Son

Dusik Bae

Hyeogki Kim

Manyoung Shin

Philwoong Jung

Hangryong Lim

Yoongwoo Yoon

Nara Yoon

Jae-Gu Soe

Dokyung Lee

Disclosed are a method of processing a substrate and a method of fabricating a semiconductor device using the same. The method of processing a substrate comprises forming a mask layer on a substrate, inspecting the mask layer, and forming a mask pattern based on an inspection result of the mask layer. The operation of inspecting the mask layer comprises using Raman spectrum analysis to detect defects in the mask layer.

Method of processing substrate and method of fabricating semiconductor device using the same

A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.

Wafer carrier

A mobile terminal including a wireless communication unit configured to wirelessly communicate with at least one other terminal; a memory configured to store a material texture assigned to a type of an application executed on the mobile terminal; a display unit configured to display screen information having the material texture assigned to the type of the application executed on the mobile terminal; and a controller configured to receive an input on the displayed screen information, and apply a visually changing textural effect to the displayed screen information that corresponds to the material texture assigned to the type of the application.

Mobile terminal and method of controlling the mobile terminal for displaying visual effects in a user interface

Growing community of inventors

Seoul, South Korea

Yoonmi Lee