Hyundai Motor Company

Hyundai Steel Company

Korea Telecommunication Authority

Korea Institute of Ceramic Engineering and Technology

Yoon Suk Oh

Hyuk Kang

In Woong Lyo

Sang Jin Park

Woong Pyo Hong

Kwang Hoon Choi

Soon Hyung Kwon

Sung Min Lee

Jeong Nam Yoon

Heo Young Lee

The present invention relates to a method of forming a plasma resistant oxyfluoride coating layer, including: mounting a substrate on a substrate holder provided in a chamber; causing an electron beam scanned from an electron gun to be incident on an oxide evaporation source accommodated in a first crucible, and heating, melting, and vaporizing the oxide evaporation source as the electron beam is incident on the oxide evaporation source; vaporizing a fluoride accommodated in a second crucible; and advancing an evaporation gas generated from the oxide evaporation source and a fluorine-containing gas generated from the fluoride toward the substrate, and reacting the evaporation gas generated from the oxide evaporation source and the fluorine-containing gas generated from the fluoride to deposit an oxyfluoride on the substrate. According to the present invention, it is possible to form a dense and stable oxyfluoride coating layer having excellent plasma resistance, suppressed generation of contaminant particles, and no cracks.

Forming method of plasma resistant oxyfluoride coating layer

Disclosed is a method and apparatus for forming a coating layer using a physical vapor deposition apparatus equipped with a sputtering apparatus and an arc ion plating apparatus, comprising: a first coating step of forming a Mo coating layer on a base material using a the sputtering apparatus and a Mo target and Ar gas; a nitrating step of forming a nitride film forming condition using an arc ion plating apparatus and Ar gas and Ngas; a second coating step of forming a nano composite coating layer of Cr&#x2014;Mo&#x2014;N using the Mo target and Ar gas of the sputtering apparatus and the Ar gas, Ngas and a Cr source of the arc ion plating apparatus at the same time; and a multi-coating step of forming a multi-layer having alternating Cr&#x2014;Mo&#x2014;N nano composite coating layers and Mo coating layers by revolving the base material around a central pivot.

Method and apparatus for forming coating layer with nano multi-layer

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Seoul, South Korea

Yoon Suk Oh