Samsung Electronics Co., Ltd.

Yoon-Mi Lee

Jin-Ho Kim

Jung-Dae Park

Yeong-Cheol Lee

Hang-Ryong Lim

Se-Won Ko

Du-Sik Bae

Min-Seon Lee

A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.

Substrate carrier

Growing community of inventors

Seoul, South Korea

Yoon-Mi Lee