Nikon Corporation

Yoon Jung Jeong

Michael B Binnard

Alton Hugh Phillips

Matthew Parker-McCormick Bjork

A vibration reduction system includes a base, a carrier element, and a plurality of actuator systems extending between the base and the carrier element, the plurality of actuator systems arranged to apply forces to the carrier element in multiple axes to reduce vibration of the carrier element, each actuator system of the plurality of actuator systems including a pneumatic actuator and an electric actuator.

Vibration reduction system for precision robotics applications

Positioning assemblies for use with a robot include a gimbal assembly having a gimbal's rotational center is positioned directly above a center of gravity of a payload. One or more linear counter masses and/or one or more rotating masses (flywheels) can be provided, and each can include an actuator or brake to control forces acting between the counter masses and/or flywheels and the payload and stabilize the payload during and after movement of the payload with the robot.

Balanced active stabilizers

Apparatus include a reaction mass and an actuator coupled to the reaction mass. The actuator is configured to couple to a payload and to move the reaction mass in response to a movement error of the payload to reduce the movement error of the payload. Robotic systems using actuated reaction masses, as well as related methods of reducing movement errors, are also disclosed.

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San Mateo, CA, United States of America

Yoon Jung Jeong