Daewoo Electronics Co., Ltd.

Yoon-Joon Choi

Yong-Ki Min

Kyu-Ho Hwang

Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has an active matrix having electrical wiring and a connecting terminal, a first actuator, a second actuator, a supporting element, and a reflecting member. The first actuator and the second actuator are parallely formed and the supporting element is formed in the direction perpendicular to the first actuator and the second actuator. The reflecting member supported by a plurality of posts is tilted by a double displacement, so the quality of a picture projected onto a screen is greatly increased. Also, the first actuator and the second actuator respectively have symmetrical structures centering around the first anchor and the second anchor so that the first actuator and the second actuator have stable structures.

Thin film actuated mirror array in an optical projection system and

Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a supporting element for supporting the actuator and for preventing an initial deflection of the actuator. The actuator has a bottom electrode, an active layer, a top electrode. The supporting element has a supporting layer attached beneath the bottom electrode for supporting the actuator, a supporting member for supporting the actuator, the supporting member being formed between the substrate where the connecting terminal is formed and a bottom of a first portion of the supporting layer, and a secondary supporting member for preventing an initial deflection of the actuator, the secondary supporting member being formed between the substrate and a bottom of a second portion of the supporting layer. According to the present invention, the initial deflection of the actuator can be made uniform and a contrast of a picture projected onto a screen can be increased by reinforcing the secondary supporting member between the substrate and the supporting layer so as to reduce uneven residual stresses and stress gradients of an actuator.

Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having electrical wiring and a connecting terminal, an actuator, and a reflecting member. The actuator has a supporting layer, a bottom electrode, an active layer, and a top electrode. The supporting layer has a first portion attached beneath the bottom electrode and a second portion exposed out of bottom electrode. The reflecting member is formed on the second portion of supporting layer. The supporting layer tilts with the actuator. Hence, the thin film AMA has much enhanced light efficiency of the right reflected by the reflecting member by minimizing the area of the actuator and maximizing the area of the reflecting member, so the quality of a picture projected onto a screen is greatly increased.

Thin film actuated mirror array in a optical projection system and

The thin film AMA has a substrate, an actuator, a common line, and a reflecting member. The substrate has an electrical wiring and a connecting terminal and the actuator has a supporting layer, a bottom electrode, a top electrode, and an active layer. The common line is formed on a portion of actuator and is connected to top electrode. The electrical wiring and connecting terminal may not be damaged because actuator is formed on a portion of substrate adjacent to the portion where electrical wiring and connecting terminal are formed. The voltage drop of a second signal can be minimized because common line is formed thickly on a portion of actuator, so a sufficient second signal is applied to top electrode. The flatness of reflecting member may be enhanced because reflecting member is formed on a second sacrificial layer.

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Seoul, South Korea

Yoon-Joon Choi