Tes Co., Ltd

Yoon Bum Kim

Jae Wan Park

Jeong Yong Kim

Jae Ok Park

Hyeon Ju Kim

Eun Jae Choi

Soo Jong Lee

Chang Hyun Jee

Sung Pyo Lee

Byoung Sam Choi

The present invention relates to an apparatus for transferring a substrate. The apparatus includes a supporting member; an elevating and rotating member; a transferring unit; a first arm whose one end is supported by the elevating and rotating member to be rotatable; a second arm whose one end is supported by the transferring unit to be rotatable and whose the other end is supported by the other end of the first arm to be rotatable; and an arm driving part, installed on the first arm, which drives the other end of the second arm to pivot on the other end of the first arm to allow the first arm and the second arm to be folded or unfolded and thus removes the state of singularity by rotating the other end of the second arm based on the other end of the first arm.

Apparatus for transferring substrates

Growing community of inventors

Seoul, South Korea

Yoon Bum Kim