Automated Precision, Inc.

Ap Infosense Limited

Yongwoo Park

Kam Chiu Lau

Po Shan Chan

Man Wai Cheng

Fei Yeung

Shuai Sun

Qi Lang

A three-dimensional profiler includes a broadband radiation source. An interferometric system receives the radiation and includes first and second beam splitters, a moving time delay-inducing reflector, and a stationary reflector. The interferometric system creates a time-delayed optical sample radiation source and an optical reference incident radiation source with the first beam splitter. A stationary sample holder receives the optical sample incident radiation. A reference plane receives the optical reference incident radiation. A detector receives an interference signal from reflected or scattered optical sample radiation and reflected or scattered optical reference radiation. A processor extracts an optical path difference between the reference plane and the sample and reconstructs a three-dimensional morphology of the sample.

Broadband profiler system and method for constructing a three-dimensional profile of a target

A broadband interferometry for a measurement range extension beyond a coherence length of a light source is achieved through a local oscillation of the reference beam is replicated by a cavity multiplication or cascading optical delayed lines with a fiber optic cavity, and quantifiable optical properties including a wavelength group delay, a chromatic dispersion, a polarization mode dispersion and a model dispersion are inserted into the local oscillation of the reference beam to incrementally quantify the replicated copies of the local oscillation as the number of the delayed copies of the local oscillation increase for extension of a measurement rage to the target.

Broadband interferometry and method for measurement range extension by using same

Growing community of inventors

Rockville, MD, United States of America

Yongwoo Park