Globalfoundries Singapore Pte. Ltd.

Yongtian Hou

Elgin Kiok Boone Quek

Khee Yong Lim

Ming-Tsang Tsai

Methods for producing FETs with negative capacitance and the resulting device are disclosed. Embodiments include forming a gate stack over a semiconductor substrate by: forming a gate oxide over the semiconductor substrate; forming a first metal gate electrode over the gate oxide; forming a dummy gate over the metal gate electrode; and forming sidewall spacers on first and second sides of the gate stack; forming an ILD over the substrate and gate stack; removing the dummy gate and at least a portion of sidewall spacers to form an opening; forming a ferro-electric (FE) layer in the opening; and forming a second metal gate electrode over the FE layer.

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Singapore, Singapore

Yongtian Hou