Samsung Electronics Co., Ltd.

Hyundai Motor Company

Kia Motors Corporation

Innowireless Co., Ltd.

Yonghee Kim

Dougyong Sung

Seungbo Shim

Minjae Lee

Donghyeon Na

Myungsun Choi

Minyoung Hur

Byunghun Han

Hyeongmo Kang

Eun Sik Kim

Jinsoup Joung

Seunghwan Ji

Hakyoung Kim

Jong Ho Hong

Sungwook Hong

Sangmin Jeong

Ohkeol Kwon

Taekjoon Rhee

A plasma etching method and a semiconductor device fabrication method, the plasma etching method including providing a source power having a first single pulse to an electrostatic chuck in order to generate a plasma on a substrate; providing a first bias power having a burst pulse different from the first single pulse to concentrate the plasma on the substrate; and providing a second bias power having a second single pulse the same as the first single pulse to accelerate the plasma toward the substrate.

Plasma etching method and semiconductor device fabrication method including the same

A method of manufacturing a semiconductor device includes: providing a first process gas including oxygen and a second process gas including carbon and fluorine to a process chamber at a first flow rate ratio to etch an etch target layer; and providing the first process gas and the second process gas to the process chamber at a second flow rate ratio to passivate the etch target layer, wherein a flow rate of the first process gas is substantially constant.

Method of manufacturing semiconductor device

Disclosed is a regulator for clutch operating mechanism. The regulator includes a main body, a supply flow path for fluid flow from a master cylinder to an operating cylinder, and a return flow for fluid flow from the operating cylinder to the master cylinder inside of the main body. The regulator further includes a first valve installed inside the main body and configured to close an exit of the return flow path and open the supply flow path when the fluid flows to the operating cylinder and a second valve installed inside the main body configured to close an exit of the supply flow path and to open the return flow path when the fluid flows to the master cylinder. The regulator further includes a damping apparatus having a damping space which communicates with the supply flow path of the main body and whose internal capacity changes according to hydraulic pressure.

Regulator for clutch operating mechanism

A regulator for clutch actuator includes a housing having a cylindrical damping space inside, a first fluid path interconnecting the damping space and a master cylinder, and a second fluid path interconnecting the damping space and a an operating cylinder. The regulator further includes a flexible valve member contained in the damping space for reducing vibrations. The flexible valve member comprises a first inflow guiding portion configured to receive and guide fluid from the first fluid path. The first inflow guiding portion has a plurality of through holes such that elastic deformation of the first inflow guiding portion reduces vibration when fluid flow into the cylindrical damping space from the master cylinder.

Regulator for clutch actuator

A clutch regulator for vehicle comprises a main body provided with an oil passage inside thereof; an opening and closing member provided inside of the main body in a slide manner to open and close the oil passage; an elastic member configured to elastically press the opening and closing member toward the oil passage side; and a plug member installed in the main body to support the elastic member.

Clutch regulator for vehicle

A device for transmitting TDD downlink data in an LTE system includes: a data buffer sequentially loading IP data irregularly delivered from a layer 3 processing unit; a transmission control unit providing instructions for the creation of an ordinary downlink sub-frame PDU queue and a special sub-frame PDU queue at a ratio appropriate to UL/DL configuration information and sequentially delivering the data loaded in the ordinary downlink sub-frame PDU queue and the special sub-frame PDU queue to a layer 1 processing unit in the order prescribed in UL/DL configuration and in the loaded order; and an ordinary downlink sub-frame PDU queue creating unit and a special sub-frame PDU queue creating unit which create the ordinary downlink sub-frame PDU queue and the special sub-frame PDU queue according to the instructions of the transmission control unit and load the data loaded in the data buffer.

Device and method for transmitting TDD downlink data in an LTE system

In a nonvolatile semiconductor memory device having a memory cell array region and a strap region for providing voltage to the memory cell array region, in the memory cell array region, a plurality of word lines and a plurality of source lines are formed in a row direction, and one source line is formed between two word lines. In the strap region, the word lines and the source lines extend in the row direction and are collinear with, and without separation from, the word lines and the source lines of the memory cell array region, and each of the word lines and the source lines has a word line contact and a source line contact.

Nonvolatile semiconductor memory device having strap region and fabricating method thereof

Growing community of inventors

Suwon-si, South Korea

Yonghee Kim