Industrial Technology Research Institute

National Taipei University of Technology

Yong-Tong Zou

Liang-Chia Chen

Hau-Wei Wang

Jin-Liang Chen

Huang-Wen Lai

Huang-Chi Huang

Ding-Kun Liu

Chih-Hsiang Chan

Chun-Tai Lien

An embodiment of the invention provides an apparatus for measuring a conductive pattern on a substrate, which includes a first electro-optical modulator surrounding at least one first detecting roller; transmission rollers for transferring the substrate and allowing direct contact of the substrate and the first electro-optical modulator; a voltage supplier for providing a bias between the first electro-optical modulator and the substrate; and a first image detecting system for receiving a first detecting light reflected from a first surface of the substrate.

Apparatus for measuring conductive pattern on substrate

A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface.

Method for determining vibration displacement and vibrating frequency and apparatus using the same

Growing community of inventors

Taoyuan County, Taiwan

Yong-Tong Zou