Ap Systems Inc.

Yong Soo Moon

Sang Hyun Ji

Chan Ho Hong

Seung Hwan Lee

Gun Bum Lee

Oh Seung Kwon

Hahn Joo Yoon

Provided are an apparatus for processing a substrate and a method for measuring a temperature of the substrate. The apparatus for processing the substrate includes a temperature measurement part and a light-transmitting shield plate. The temperature measurement part includes a light source, a light receiving part configured to receive reflected light reflected by the substrate or the shield plate among the light irradiated from the light source, and a radiant light emitted from the substrate to measure a quantity of the reflected light and an intensity of the radiant light and a temperature calculation part configured to calculate the temperature of the substrate, to which a contamination level of the shield plate is reflected, by using the quantity of the reflected light and the intensity of the radiant light.

Apparatus for processing substrate and method for measuring temperature of substrate

A substrate treatment method in accordance with an exemplary embodiment includes: heating a substrate, for a substrate treatment process, so that a temperature of the substrate reaches a target temperature; calculating the temperature of the substrate using a sensor located facing the substrate while heating the substrate; and controlling an operation of a heating part configured to heat the substrate according to the temperature calculated from the calculating the temperature, wherein the calculating the temperature comprises: measuring a total radiant energy (E) radiated from the substrate using the sensor; calculating a corrected total emissivity (&#x3b5;) by applying a correction value for correcting the total emissivity (&#x3b5;) which is the emissivity of the radiant energy (E); and calculating the temperature (T) of the substrate using the total radiant energy (E) and the corrected total emissivity (&#x3b5;).

Substrate treatment method and substrate treatment apparatus

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Incheon, South Korea

Yong Soo Moon