Samsung Electronics Co., Ltd.

Yong Seok Ihn

Sang Hyun Park

Sang Don Jang

Yoo Chang Kim

Sang Joon Hong

Ja Choon Koo

Oui Serg Kim

Jung Woong Jang

An actuator according to example embodiments may be relatively compact and may be driven with 2 degrees of freedom with less spatial constraints. The actuator may include a base member, a ball screw member including a ball screw coupled to the base member and a ball nut screwed onto the ball screw, a driving member coupled to the ball nut so as to move in conjunction with the ball nut, a first directional displacement member configured to move in a first direction in response to a first movement of the driving member, a wedge member coupled to the driving member so as to be moved in a second direction in response to a second movement of the driving member, a second directional displacement member configured to move in a second direction in conjunction with the wedge member, and a binding member configured to bind the first directional displacement member to at least one of the driving member, the wedge member, and the base member.

Actuator, stage device, and exposure apparatus

Growing community of inventors

Paju-si, South Korea

Yong Seok Ihn