Taiwan Semiconductor Manufacturing Comp. Ltd.

TSMC Solar Ltd.

Yong-Ping Chan

You-Hua Chou

Yen-Chang Chao

Yen-Shuo Su

Chih-Ching Lin

Jung-Chen Yang

Cheng-Tao Lee

Jain-Shing Tsai

Kai-Yu Tung

A method for manufacturing a thin film solar cell device includes forming a back contact layer on a substrate, forming an CIGS absorber layer on the back contact layer, treating the CIGS absorber layer with a metal-based alkaline solution, and forming a buffer layer on the CIGS absorber layer where the treatment of the CIGS absorber layer improves the adhesion between the CIGS absorber layer and the buffer layer and also improves the quality of the p-n junction at the CIGS absorber layer/buffer layer interface.

Metal-based solution treatment of CIGS absorber layer in thin-film solar cells

A method of testing a test wafer includes shielding test centers on a test wafer using shielding tabs during the deposition of a layer. The test wafer has the same size and shape of product wafers. The shielding tabs are then removed from the test wafer. A plurality of predetermined points which are separated from each test center by a critical interval are checked, and whether each point is covered by the layer is determined through an interferometer or a microprobe. The test wafer is processed after adjustments to or maintenance on equipment, or after a fixed number of product wafers have been processed.

Method for detecting alignment mark shielding

A capacitor having an electrically/conductive plate, an electrically conductive segmented electrically conductive plate segments and a second plurality of electrically conductive plate segments, a first capacitor dielectric disposed between the plate and the segment plate, at least one electrically conductive interconnect coupling each of the plate segment of one of the first and second plurality of plate segments to the plate, and a second capacitor dieletric disposed between the plate segments.

Metal-insulator-metal capacitor structure

Growing community of inventors

Taipei County, Taiwan

Yong-Ping Chan