Taiwan Semiconductor Manufacturing Comp. Ltd.

Yong-Jyu Lin

Chi-Feng Tung

Hsiang Yin Shen

Fu-Hsien Li

Chen-Wei Lu

Chuan Wei Lin

Rong-Shen Chen

A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.

Method for operating conveying system

A system for a semiconductor fabrication facility (FAB) includes an orientation tool and a transporting tool configured to transport at least one customized part. The orientation tool includes a port configured to receive the workpiece, a sensor configured to detect an orientation of the workpiece received in the port and a rotation mechanism configured to turn the workpiece received in the port.

System for a semiconductor fabrication facility and method for operating the same

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Hsinchu, Taiwan

Yong-Jyu Lin