Samsung Electronics Co., Ltd.

Yong Joon Hong

Ki Moon Lee

Chi Gun An

Dae Hyung Park

Kang Min Park

Sang Jin Choi

Chul Hwan Choi

Dae Wee Kong

Kang Soo Kim

Heok Jae Lee

Sang Ho Roh

A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

Substrate transfer apparatus

Disclosed herein are a motor control apparatus and a motor control method thereof. The motor control method includes estimating a current torque of a motor based on dynamics of a body driven by the motor, judging whether the estimated torque is higher than a predetermined torque value, compensating for a velocity profile to drive the motor from the predetermined torque value, upon judging that the estimated torque is higher than the predetermined torque value, and driving the motor using the compensated velocity profile. Thereby, the velocity profile is compensated for in real time, and thus the velocity of the motor is raised while preventing the motor from stepping out.

Motor control apparatus and motor control method thereof

Disclosed is a teaching and playback method using a redundancy resolution parameter determined in conjunction with a joint structure, for a robot, and a method to apply analytic inverse kinematics to a robot having an elbow with an offset and a computer-readable medium of controlling the same. A reference plane variable with the joint structure is generated and an angle between the reference plane and an arm plane of the robot is used as the redundancy resolution parameter. The robot is taught and its operation is played back in differential inverse kinematics or analytic inverse kinematics using the resolution redundancy parameter.

Teaching and playback method based on control of redundancy resolution for robot and computer-readable medium controlling the same

A motor speed controlling method is provided in a motor speed controlling apparatus including a motor for driving the robot, a position controller for controlling position of a motor and a main controller for producing a speed command profile of a smooth curve to control the motor based on a robot operational command input by a user and transmit the produced speed command profile to the position controller. The motor speed controlling method includes a step of producing a speed command profile having an acceleration profile of a smooth curve within a predetermined robot control interval so that a robot can be controlled on a real-time basis. Accordingly, vibration and noise of the motor are reduced and thus a control reliability is enhanced.

Method for controlling speed of motor for driving robot

Growing community of inventors

Suwon-si, South Korea

Yong Joon Hong