Samsung Electronics Co., Ltd.

Information and Communications University Educational Foundation

Yong Deok Jeong

Yusin Yang

Younghoon Sohn

Sangkil Lee

Hyuek Jae Lee

Min Ho Kang

Yong Hyub Won

Mira Park

Hark Yoo

Methods and apparatuses for inspecting a semiconductor device using electron beam are provided. The methods may include performing detection operations on a detection target pattern N times and determining a number of detection operations which have been performed until a maximum secondary electron amount of the detection target pattern is obtained. Each of the detection operations may include irradiating the detection target pattern with an electron beam, interrupting the irradiating and detecting a secondary electron amount of the detection target pattern after a detection waiting time has elapsed since the interrupting the irradiating.

Methods and apparatuses for inspecting semiconductor devices using electron beams

Disclosed are an apparatus and method for converting the wavelength of an optical signal using a multi-mode Fabry-Perot laser diode. The apparatus controls polarization of an external pump optical signal to output a TE polarized pump optical signal, and controls polarization of a probe optical signal to output a TM polarized probe optical signal. The apparatus couples the TM polarized probe optical signal and TE polarized pump optical signal irrespective of the polarization of the optical signals. The apparatus finely controls the polarization of the pump optical signal and the polarization of the probe optical signal such that they conform to TE and TM modes of the Fabry-Perot laser diode, respectively. The Fabry-Perot laser diode injection-locks the TE polarized pump optical signal of the coupled signal to change the position of a TM mode absorption null (a point at which an output optical signal has the minimum intensity), to thereby convert the wavelength of the TE polarized pump optical signal to the wavelength of the TM polarized probe optical signal. Accordingly, a wide wavelength conversion band is provided, and inverting and non-inverting wavelength conversions are easily carried out.

Optical wavelength conversion apparatus and method using injection locking of fabry-perot laser diode

Growing community of inventors

Chungcheongbuk-do, South Korea

Yong Deok Jeong