Korea Basic Science Institute

Yong-Cheol Hong

Ji-Hun Kim

Jung-sik Yoon

There is provided a microwave plasma torch system comprising: a plasma generator; a microwave generator; and at least one plasma source gas injector, wherein the microwave generator includes a waveguide, wherein the plasma generator includes a discharge tube, wherein the discharge tube passes through a waveguide in a perpendicular to the waveguide, wherein the waveguide has a width na, where n is an integer equal to or larger than 2, wherein a is defined as a width of a waveguide having a dominant mode for propagating a microwave, wherein the discharge tube is positioned relative to the waveguide such that a diameter center of the tube encounters a longitudinal null line of an electric field distribution, wherein the discharge tube is further positioned relative to the waveguide such that a diameter center of the tube encounters a transverse null line of an electric field distribution, wherein the transverse null line is perpendicular to the longitudinal null line.

Microwave plasma torch

The purpose of the present invention is to solve the problems of conventional high frequency plasma torches and develop a plasma torch which enables quick quenching of high frequency plasma and which overcomes instability resulting from the quick quenching. To accomplish the abovementioned objective, according to one embodiment of the present invention, disclosed is an electromagnetic wave high frequency hybrid plasma torch. The electromagnetic wave high frequency hybrid plasma torch may comprise: an electromagnetic wave oscillator for oscillating electromagnetic waves; a power supply unit for supplying power to the electromagnetic wave oscillator; an electromagnetic wave transmission line for transmitting the electromagnetic waves generated by the electromagnetic wave oscillator; a first plasma-forming gas supply unit for injecting a plasma-forming gas; an electromagnetic wave discharge pipe for generating plasma by the electromagnetic waves introduced from the electromagnetic wave transmission line and the plasma-forming gas injected by the first plasma-forming gas supply unit; a high frequency discharge pipe for introducing an electromagnetic wave plasma flow from the electromagnetic wave discharge pipe; an induction coil structure which is coaxial with the high frequency discharge pipe and which has an interior with an induction coil inserted therein; a cooling water channel for introducing cooling water around the high frequency discharge pipe and discharging the cooling water; and a second plasma-forming gas supply unit for introducing a plasma-forming gas into the high frequency discharge pipe.

Growing community of inventors

Goyang-si, South Korea

Yong-Cheol Hong