Industrial Technology Research Institute

Other

Yong-Chen Chung

Chia-Chun Hsu

Chia-Hung Lin

Ming-Chi Chen

Wen-Hung Feng

Chuan-Feng Chen

Ming-Chang Dang

A parallelism adjustment device applicable to nano-imprint lithography has an imprint unit, a carrier unit, a parallelism adjustment mechanism, and a driving source. The imprint unit has a first molding plate and an imprinting mold mounted on the first molding plate. The carrier unit has a second molding plate and a substrate mounted on the second molding plate. The parallelism adjustment mechanism has an enclosed resilient film and a fluid filled therein, and is coupled to at least one of the first and second molding plates. The driving source drives at least one of the imprint unit and the carrier unit to form contact between the mold and the moldable layer. The parallelism adjustment device is pressed via the contact to adjust parallelism for the imprint mold and the substrate and uniformly distributes the pressure between the mold and the substrate, making the molding quality of nano-imprint lithography significantly improved.

Parallelism adjustment device

An electromagnetic coaxial driving injection apparatus, having a linear motor for driving injection and a rotation motor for metering. The linear motor and the rotation motor of both the injection and metering motors and an injection screw are set on a common axis. A connecting device connects moving parts of the motors with the injection screw. Stationary parts of the motors are fastened on a frame and forward-backward moving unit, not moving during injection and metering. Due to the arrangement of the moving parts and the injection screw on a single axis, moving parts are lessened, and transmission losses are minimized. Since the number of structural parts is low, only the moving parts of the motors move during injection while the stationary parts thereof remain at rest, thus greatly reducing inertia. Furthermore, since the moving axis of the injection screw and the injection screw are linked, without being connected with stators or other structural parts, injection is performed with minimal friction, enhancing effectiveness of the apparatus. The main characteristic of the present invention is that, due to direct driving of injection without mechanical transmission, the effects of hysteresis and backlash are avoided. Furthermore, inertia and friction are reduced. The present invention increases the response and reappearance of the system.

Electromagnetic coaxial driving injection apparatus

A uniform pressing apparatus used in nanoimprint lithographic process is proposed, including a housing having a first flange; a first carrier unit for carrying an imprint mold and having at least one second flange freely attaches to the first flange; a second carrier unit for carrying a substrate; at least one uniform pressing unit mounted on a imprint force transmission path; and a power source driving at least one of the housing and the second carrier unit to allow a contact to be formed between the mold and the moldable layer. Therefore, the nanoimprint lithographic process is achieved with good parallelism between the substrate and the mold and with uniform pressure distribution.

Uniform pressing apparatus

A lift cord concealable Venetian blind lift control mechanism is constructed to include a base having two hollow screw rods axially aligned at two sides and selectively mounted in the top or bottom rail of a Venetian blind, a revolving rod inserted through the hollow screw rods, a spring member, which provides a torsional force to the revolving rod, two bobbins respectively threaded onto the screw rods for synchronous rotation with the revolving rod. The left and right lift cords of the Venetian blind each have one end connected to the bottom or top rail and the other end fastened to the bobbin such that when the bottom rail of the Venetian blind lifted or lowered by an external force, the bobbins are synchronously rotated to wind up or let off the lift cords; when the external force disappeared, the bobbins are immovable, keeping the bottom rail in position.

Growing community of inventors

Hsinchu, Taiwan

Yong-Chen Chung