Toshiba Memory Corporation

Yoko Yoshimura

Masumi Saitoh

Yuuichi Kamimuta

Chika Tanaka

Kensuke Ota

Shoichi Kabuyanagi

Hiromichi Kuriyama

Yoshihiko Moriyama

A storage device includes a first conductive layer and a second conductive layer, with an intermediate layer therebetween. The intermediate layer includes a first and second compound regions. The first compound region includes first and second adjacent portions and the second compound region includes third and fourth adjacent portions. Electrical resistance between the first and second conductive layers changes according to a polarity applied across the intermediate layer. In a first polarity state, a concentration of a first element in the first portion is higher than a concentration of the first element in the second portion of the first compound region. A thickness of the third portion in the first polarity state is greater than the thickness of the fourth portion in the first polarity state.

Storage device

A memory device according to an embodiment includes a first conductive layer extending in a first direction, a second conductive layer extending in the first direction, a third conductive layer extending in a second direction intersecting the first direction, an insulating layer containing aluminum oxide provided between the first conductive layer and the second conductive layer, and a first insulating film including a first region located between the first conductive layer and the third conductive layer and a second region located between the insulating layer and the third conductive layer. The first region includes hafnium oxide mainly formed as an orthorhombic. The second region includes hafnium oxide mainly formed as crystals other than the orthorhombic.

Memory device

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Yokkaichi Mie, Japan

Yoko Yoshimura