Seiko Instruments Inc

The University of Tokyo

Other

Yoko Shinohara

Manabu Oumi

Takashi Niwa

Kenji Kato

Yasuyuki Mitsuoka

Nobuyuki Kasama

Hidetaka Maeda

Takeshi Uchiyama

Susumu Ichihara

Norio Chiba

Masakazu Hirata

Sachiko Tanabe

Masayuki Suda

Yoshikazu Tanaka

Masataka Shinogi

Kiyoshi Matsumoto

Isao Shimoyama

Hidetoshi Takahashi

Minh-Dung Nguyen

Satoshi Watanabe

Koichi Moriya

Yutaka Tomimatsu

Ayako Nobe

Yoshiyuki Kaiho

Akihiro Iino

Masao Kasuga

Makoto Suzuki

Tatsuru Sato

Kazuo Tani

Minao Yamamoto

Norihiro Dejima

Fumio Kimura

Tatsuro Sato

Toshifumi Ohkubo

Kiyoshi Itao

Hiroshi Hosaka

Haruki Kato

Terunao Hirota

A tilt sensor includes: a pressure sensor disposed to be relatively movable with respect to a detection target object and configured to detect pressure of a fluid; and a tilt information detection unit configured to detect tilt information (for example, a tilt angle) of the detection target object according to an output of the pressure sensor and movement information of the pressure sensor.

Tilt sensor

A pressure change measuring apparatus and a pressure change measuring method are capable of detecting a change in pressure to be measured with respect to a time axis with high accuracy. The pressure change measuring apparatus includes a reference value setting unit that generates a reference value signal based on an output signal of a differential pressure measuring cantilever under a predetermined state and outputs the reference value signal. An arithmetic processing unit calculates the pressure change in the pressure to be measured based on the output signal, the reference value signal, a volume of a cavity, and a flowing quantity of a pressure transmission medium flowing into and out of the cavity for every unit of a predetermined time period.

Pressure change measurement device, altitude measurement device, and pressure change measurement method

An arithmetic processing unit included in a pressure change measuring apparatus includes a differential pressure calculation unit configured to obtain a pressure difference between an inner pressure of a cavity and a pressure to be measured based on an output signal of a differential pressure measuring cantilever. A pressure-to-be-measured calculating unit calculates the pressure to be measured based on a set inner pressure of the cavity and the differential pressure calculated by the differential pressure calculation unit. A flow rate calculating unit calculates a flowing quantity of a pressure transmission medium flowing into and out of the cavity for every unit of a predetermined time period based on the differential pressure calculated by the differential pressure calculation unit. An inner pressure updating unit calculates the inner pressure of the cavity after the predetermined time period based on the flowing quantity calculated by the flow rate calculating unit and a volume of the cavity, and updates, to the calculated inner pressure, a set value of the inner pressure of the cavity to be used by the pressure-to-be-measured calculating unit.

Pressure change measuring apparatus and pressure change measuring method

A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

Pressure sensor

A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.

A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion. The first resistance portion of the lever support-portion electrically connected to the detection-electrode via a parallel path of a first path passing through the main body-resistance portion and second path passing through the second resistance portion.

Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element

A terminal device has measurement sensors for measuring physical quantities of measurement targets. A storage unit stores information determining a mode for activating the measurement sensors. Based on the information stored in the storage unit, a control unit switches all or part of the measurement sensors from a non-activated state to an activated state when the measurement sensors are to be activated. An activation unit includes an activation sensor driven on the basis of environmental changes. The activation unit is configured to activate the control unit on the basis of detection results from the activation sensor when a physical quantity correlated with the physical quantity of the measurement target satisfies a given activation condition.

Terminal device, communication system and method of activating terminal device

A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f(Hz) defined by Expression (1), where a width (&#x3bc;m) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.&#xb7;()&#x2003;&#x2003;(1)

Pressure sensor having cantilever and displacement measurement unit

A portable thermal power generation device generates power using heat produced by a living body. A thermal power generation member generates power on the basis of a temperature difference between a temperature at a heat source-side position and a temperature at a heat release destination-side position between the living body that is a heat source and a heat release destination of heat released from the portable thermal power generation device. A movable member is configured to change a thermal resistance of at least part of a heat transfer path between the living body and the heat release destination.

Thermal power generation portable device and power generation control method for thermal power generation portable device

A terminal device has at least one measurement sensor for measuring a physical quantity of a measurement target. A control unit switches the measurement sensor, when activated, from a non-activated state to an activated state. An activation unit, which is driven at lower power consumption than the measurement sensor, activates the control unit when a physical quantity having a correlation with the physical quantity of the measurement target has satisfied a given activation condition.

In a method of manufacturing piezoelectric actuators, a vibrating body plate supporting vibrating bodies at vibrational nodes thereof and a moving body plate having moving bodies are provided. Each of the vibrating bodies has a vibrator and a piezoelectric body mounted on the vibrator. The vibrating body plate and the moving body plate are stacked over one another to provide a piezoelectric actuator assembly. The piezoelectric actuator assembly is then cut at the vibrational nodes of the vibrating bodies to provide individual piezoelectric actuators.

Method of manufacturing piezoelectric actuator

A magnetic recording medium in which information can be recorded using a heat-assisted magnetic recording method comprises a recording layer formed on a substrate. The recording layer has a plurality of magnetic recording bit regions and a plurality of high thermal conductors each extending inside a corresponding one of the bit regions. The high thermal conductors have a thermal conductivity higher than that of the recording layer and assist in dissipating heat energy imparted to the bit regions during the recording of information.

Magnetic recording medium

A U-shaped groove and a V-shaped groove are formed onto a cladding disposed on a substrate, a core and a metal structure are formed inside the grooves, respectively, and then the substrate surface is planarized. Further, after a cladding is formed again, the substrate is cut and the cut surface is polished such that the metal structure inside the V-shaped groove has a predetermined thickness, thereby forming a scattering body.

Method of manufacturing near-field light generating element and near-field light generating element

A reactor comprises a main body having a flow path substrate and a crystal substrate chemically bonded to the flow path substrate to form a flow path for running a sample to be measured and a reactor tank connected to the flow path. An adsorption film is disposed in the reactor tank for adsorbing a specific substance contained in the sample to be measured. A measuring device measures a physical quantity of the specific substance contained in the sample and adsorbed by the adsorption film.

Reactor, micro-reactor chip, micro-reactor system, and method for manufacturing the reactor

A near-field light generating element has a core that propagates light flux from a light incident side to a light emission side while focusing the propagating light flux. A near-field light generating portion in the form of a metal film generates near-field light from the light flux. The core includes a first core, and a second core covering a side surface of the first core, and the core is formed in a polygonal shape when viewed from a Z direction. The metal film is placed on a side surface in the core, and is formed so that a width of an interface between the metal film and the core is narrower than a width of the side surface of the core.

Near-field light generating element, method of manufacturing near-field light generating element, near-field light head, method of manufacturing near-field light head, and information recording and playback device

Growing community of inventors

Chiba, Japan

Yoko Shinohara