Murata Manufacturing Co., Ltd.

Yoko Kaneda

Shungo Kanai

Gaku Kamitani

In a piezoelectric micro-blower, a vibration plate assembly includes a piezoelectric element attached to a diaphragm, with an intermediate plate interposed there between. A blower chamber plate includes a circular opening in a center thereof. A blower chamber defined by the diaphragm, a flow path plate, and the opening of the blower chamber plate is sized to allow internal pressure to be substantially uniformly changed by vibration of the diaphragm. The blower chamber plate and the flow path plate are provided with a first outlet and a second outlet, respectively. Compressive fluid pressurized in the blower chamber is blown out through the first and second outlets.

Piezoelectric micro-blower

A piezoelectric microblower includes a vibrating plate including a piezoelectric element and arranged to be driven in a bending mode by applying a voltage of a predetermined frequency to the piezoelectric element, and a blower body arranged to fix both ends or a periphery of the vibrating plate and to define a blower chamber between the blower body and the vibrating plate, an opening being provided in a portion of the blower body facing a central portion of the vibrating plate. In a portion of the blower chamber corresponding to the central portion of the vibrating plate, a partition is provided around the opening and a resonance space is defined inside of the partition. A size of the resonance space is set such that a driving frequency of the vibrating plate and a Helmholtz resonance frequency of the resonance space correspond to each other.

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Nagaokakyo, Japan

Yoko Kaneda