Sumitomo Heavy Industries, Ltd.

Tohoku Techno Arch Co., Ltd.

Yoji Watanabe

Yoshiyuki Tomita

Satoshi Kiyono

Toru Hirata

Kennichi Makino

Wei Gao

According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.

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Sendai, Japan

Yoji Watanabe