Nippon Pillar Packing Co., Ltd.

Yoji Minato

Makoto Fujii

Masayoshi Katsura

Kiyoshi Nishio

Ryo Imanishi

Hitoshi Kawamura

The invention provides a pulsation damping device in which an offset load on a pulsation suppression diaphragm is eliminated while an air supply valve and an air discharge valve are separately and independently juxtaposed, and an extendable and contractible portion of the pulsation suppression diaphragm is always caused to be straightly extendingly and contractingly deformed in the axial direction of a device body casing, whereby the response property of the opening and closing operations of the air supply and discharge valves can be improved and the pulsation suppressing performance can be ensured.

Pulsation damping device

Pump with a pulsation suppression device

The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the present invention has: a bellows which partitions the interior of the device body having a sealed container-like shape, into a liquid chamber and an gas chamber; an operating rod which is reciprocated in interlock relationship with the bellows; and an extension and contraction restricting mechanism which, when the bellows extends to a predetermined value, is contacted in parallel with a closed end face of the bellows, thereby restricting further extension of the bellows. Furthermore, the pulsation suppression device of the present invention has a guide for making the reciprocal operation of the operating rod coincident with the extension and contraction directions of the bellows. The guide is made of a low-friction resin material. According to the present invention, pulsation due to the discharge pressure of the transported liquid is absorbed and the amplitude of pulsation is suppressed to a low level. Moreover, the bellows used in the pulsation suppression device is prevented from being damaged, and the pulsation suppression function can be stabilized.

Pulsation suppression device for a pump

Growing community of inventors

Sanda, Japan

Yoji Minato