Sumitomo Chemical Company, Limited

Yoji Matsuda

Masaaki Toma

Masao Morikawa

Yasuyoshi Sawaguri

Akira Morisaki

Impurities are removed from aqueous hydrogen peroxide by treating the aqueous hydrogen peroxide by reverse osmosis, cation-exchanging the aqueous hydrogen peroxide and anion-exchanging the aqueous hydrogen peroxide, and the treated ultra-pure hydrogen peroxide can be used in the electronics industries.

Apparatus and method for removing impurities from aqueous hydrogen

A liquid filtering and supply system according to the present invention comprises, a main line to connect a liquid introducing part to a liquid supplying part, a filter disposed in said main line to filter said liquid, a first pressure detector disposed in said main line at an upstream side of said filter to detect a pressure of said liquid before said liquid is introduced to said filter, a second pressure detector disposed in said main line at a downstream side of said filter to detect a pressure of said liquid after said liquid passed out of said filter, a first circulating line for returning a liquid in said main line to the liquid introducing part, a pressure difference computing element to determine a pressure difference between the first pressure detector and said second pressure detector, a control valve disposed in the first circulating line, and a controlling part to adjust an opening of said control valve, based on a signal of the pressure difference transmitted from the pressure difference computing element.

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Ichihara, Japan

Yoji Matsuda