Agency of Industrial Science and Technology

Yoji Imai

Tetsuo Tsuchiya

Toshiya Kumagai

Akira Yabe

Takaaki Manabe

Susumu Mizuta

Hiroyuki Niino

Akio Watanabe

Iwao Yamaguchi

There is disclosed a method for producing a metal oxide, which comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, and a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provide a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or less wavelength, to form a metal oxide on the substrate. According to that method, a metal oxide can be produced without applying a heat treatment at a high temperature of the degree adopted in the conventionally known application thermal decomposition method.

Method for producing a metal oxide and method for forming a minute pattern

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Tsukuba, Japan

Yoji Imai