Shizuoka University

Yoichiro Neo

Masayoshi Nagao

Tomoya Yoshida

In a field emission device, the fundamental cause of spherical aberration in an emitted electron beam trajectory is eliminated or mitigated. An aberration suppressor electrodeis provided at a lower vertical position than an extraction gate electrodeso its opening inner peripheral edgefaces a position near an emitter tip. The vertical position of the opening inner peripheral edgeof the aberration suppressor electrodeis made lower than the vertical position of the emitter tip. An aberration suppressing voltage Vsp is applied to the aberration suppressor electrodethat is a lower voltage than the potential of the emitterand controls equipotential lines near the emitter tipto make them parallel.

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Hamamatsu, Japan

Yoichiro Neo