Hitachi-High-Technologies Corporation

Yoichi Uchimaki

Tetsunori Kaji

Yuko Egawa

Bays. . . are connected to an inter-bay transfer linevia bay stockers. . . , respectively. The bayis, in this embodiment, composed of a single wafer transfer linehaving a looped planar shape and processing equipmentsarranged side by side along the longitudinal transfer direction of the transfer line (direction crossing the transfer direction of inter-bay transfer line). Processing equipmentsare arranged side by side along one side of the transfer line, and the remaining processing equipmentsare arranged side by side along the other side of the transfer line. The processing equipmentsare equipped with transfer robots, respectively. Moreover, processing equipmentsare each equipped with a chamber (not shown) for processing wafers W one by one (single wafer processing chamber).

Method and apparatus for transferring substrate

A system and method of manufacturing wafers are provided suitable for a semiconductor manufacturing system and a method thereof capable of shortening the processing period composed of a series of processes applied to objects to be processed, mainly carry out processes and conveyance peace by peace, and which can manufacture even various kings of products. The system is provided with a plurality of processing units each having therein a conveying mechanism, and is provided therein with a conveyer device for conveying the objects to be processed to the processing units. Further, the conveyer device includes loader conveying means which is laid along object transferring ports of the plurality of processing units across the object transferring ports of not less than two of the processing units, and a running robot which runs across not less than two of the object transferring ports, and a transferring robot for transferring the objects to be processed from the running robot to the processing units through the transferring ports, are arranged in the loader means. The loader means is shielded and provided with a purifying device so as to define an atmospheric pressure space conveying path.

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Yamaguchi, Japan

Yoichi Uchimaki