Mitsubishi Electric Corporation

Mitsubishi Denki Kabushiki Kaisha

Yoichi Otomo

Takashi Yuzawa

Hisashi Yamada

Takashi Hashimoto

Takayuki Nakagawa

Junichi Shibata

Naoya Tsukamoto

Atsushi Itokazu

Yutaka Terada

Takashi Kakihana

Hideaki Kita

Shuichiro Ishihara

Tsubasa Yagi

A multiwire electric discharge machine includes: a plurality of guide rollers; a machining power supply that applies a voltage between each of a plurality of cutting wire sections and a workpiece; a dummy workpiece including a contact surface curved in such a way as to be capable of coming into contact with a curved surface of the workpiece except for an end point, the end point being to be reached by each of the plurality of cutting wire sections when machining of the workpiece is completed, the dummy workpiece supporting the workpiece from one side in a first direction, the first direction being a direction in which the workpiece moves; and a pressing mechanism including a pressing portion, the pressing mechanism pressing the workpiece against the dummy workpiece by bringing the pressing portion into contact with the workpiece from another side in the first direction.

Multiwire electric discharge machine, multiwire electric discharge machining method, and semiconductor wafer manufacturing method

A wire electrical discharge machine to cut a workpiece by generating an electrical discharge in a dielectric working fluid between wire electrodes arranged in parallel and the workpiece includes: a work tank that stores the dielectric working fluid; a Z-axis stage that is disposed in a lower portion of the work tank and moves the workpiece in a Z-axis direction that is a vertical direction; a pillar that extends upward from the Z-axis stage and has an upper end portion located above the highest level of a fluid level of the dielectric working fluid in the work tank; an adjuster that is installed downward from a portion of the pillar located above the highest level of the fluid level, is disposed above the highest level of the fluid level, and adjusts the position or posture of the workpiece in a direction other than the vertical direction.

Wire electrical discharge machine

Electric discharge machine

A wire electric discharge machining apparatus that machines a workpiece by using a wire supported between a lower arm and an upper arm. The apparatus includes a surface plate that has a vacant inner area in which the wire moves and supports part of the workpiece with an outer area thereof. The apparatus further includes a bellows that extends through a side surface of a casing of a machining bath, enclosing part of the lower arm, wherein a first end of the bellows that is on a side of the machining bath is attached to the lower arm so that the bellows does not get in under the inner area, at whatever position the wire machines the workpiece.

Wire electric discharge machining apparatus

The present invention includes a post-cooling temperature sensor that measures a temperature of the machining fluid immediately after being cooled by a cooling device as a post-cooling fluid temperature, and an intra-tank temperature sensor that measures a temperature of the machining fluid in a work tank as an intra-tank fluid temperature, for a cooling control device that controls a fluid temperature of the machining fluid in a wire electric discharge machining apparatus, and the cooling control device has a first temperature-feedback control unit that feeds back the post-cooling fluid temperature into a cooling instruction value as an instruction value for the cooling device, and a second temperature-feedback control unit adjusts the cooling instruction value by feeding back the intra-tank fluid temperature to cause the intra-tank fluid temperature to follow a target temperature.

Wire electric discharge machining apparatus and cooling control device

Wire electric discharge machine in which traveling direction of wire electrode is changed by lower roller arranged at lower portion of a workpiece, wire electrode is held and pulled by capstan roller and pinch roller, and electric power is supplied between wire electrode and workpiece while wire electrode is traveling so that workpiece is machined by electric discharge energy, capstan roller and pinch roller are arranged so that angle &thgr; by which the traveling direction of wire electrode is changed by capstan roller and pinch roller, can be 0&deg;<&thgr;<90&deg; directed upward with respect to traveling direction of wire electrode, direction of which is changed by lower roller. Breakage of wire electrode can be supressed. Feed of wire electrode can be automated. When wire cutter is used, entry of machining solution into wire cutter can be prevented. When wire cutter is not used, accommodation of used wire electrode can be enhanced.

Wire electric discharge machine

An automatic wire feeder of a wire electric discharge machine in which electric discharge is generated between a traveling wire electrode ( ) and a workpiece so as to machine the workpiece by the electric discharge energy, comprises: a feed roller ( ) for feeding the wire electrode ( ); a slider block ( ) supported being capable of going up and down; a guide pipe ( ), fixed to the slider block ( ), for guiding the wire electrode ( ); a hollow member ( ), fixed to the slider block ( ), the outer diameter of which is reduced in a wire feed direction; and a pressurized gas supply for supplying pressurized gas toward the outer diameter of the hollow member ( ), wherein a forward end section of the hollow member ( ) is inserted into an inner diameter section of an upper section of the guide pipe ( ) while a predetermined overlapping length L is kept, a predetermined clearance D is formed between the inner diameter of the guide pipe ( ) and the outer diameter of the forward end section of the hollow member ( ), and a thrust is given to the wire electrode ( ) by pressurized gas, which is supplied by the pressurized gas supply. By the conveyance force of pressurized gas flowing in the guide pipe ( ), the wire electrode ( ) can be automatically fed with high reliability.

Growing community of inventors

Tokyo, Japan

Yoichi Otomo