Murata Kikai Kabushiki Kaisha

Murata Machinery, Ltd.

Yoichi Nakamura

Takashi Nakao

Hiroshi Mima

Tamotsu Shiwaku

Isao Fukuda

Ryosuke Tahara

Masayoshi Torazawa

Masao Hirukawa

Akihiko Ishiura

Koichi Osuka

Tatsuo Jinyama

Hirayuki Kawabata

Shinji Shirai

In a wafer storage container, a first ring and a second ring are stacked alternatively in a vertical direction. A wafer delivery device is provided with a first ring support and a second ring support. The first ring support includes a first support piece fixed at the vertical position and a first driving mechanism to drive the first support piece. The first driving mechanism is selectively switchable among a first state, a second state, and a third state. In the first state, the first support piece overlaps with the first position in a plan view. In the second state, the first support piece overlaps with the second position in a plan view. In the third state, the first support piece does not overlap with the first and the second positions in a plan view.

Wafer delivery device, wafer storage container, and wafer storage system

In an upper limb training apparatus, a movable frame is supported by a fixed frame placed on a floor surface such that the movable frame can tilt in all directions. An operation rod including an operation rod main body and an attachment fixed portion is attached to the movable frame and can extend and contract. The attachment fixed portion, to which an attachment is fixed, is attached to the tip of the operation rod main body and includes an elastic member that absorbs forces in any directions other than the axial direction relative to the operation rod main body. The axial displacement detecting section can thereby grasp just the axial force applied to the operation rod by detecting the displacement of attachment fixed portion in the axial direction.

Upper limb training apparatus

In a curve section, a comb tooth markis provided concentrically with a center lineof a running rail. A comb tooth sensoron an overhead running vehiclereads comb teeth. Then, corrections are made using the ratio of the radius of curvature (R) of the center lineand the radius of curvature (r) of the comb tooth mark. An encoder interpolates the areas between the teeth. Then, the position of the overhead running vehiclein the curve section is determined. The present invention thus enables the exact position of the overhead running vehicleto be recognized even when the overhead running vehicleis located in a curve section. This makes it possible to provide a load port in a curve section.

Carriage system

Guide tracksprojecting in a vertical direction are provided in a right and left of a running trackand left and right guide rollersare provided on a track guided vehicle and guided using inner surfaces of the left and right guide tracks. Branching rollerseach comprising elevating and lowering means are provided in the right and left of the track guided vehicle and outside the right and left guide tracks. Thus, branching and rectilinear progression of the track guided vehicle is controlled by switching between a state where the branching rollersare elevated or lowered to guide the track guided vehicle using outer surfaces of the guide tracksand a state where the branching rollersdo not contact with the outer surfaces. Whether the track guided vehicle runs straight or shifts to a branch line can be controlled by contacting one of the branching rollerswith the outer surface of the corresponding guide tracks, which guide the guide rollersin the section (rectilinear progression section) different from the branching portion

Track guided vehicle system

A platformis supported by four beltsto. Of the beltsto, a pair of beltsis attached to a pivoting armso that the pivoting armis pivotable around a pivoting shaft. Pivoting of the pivoting armabsorbs, for example, the difference in length between the belts. The present invention makes it possible to simplify an elevate and lower driving mechanism of the platformand to easily adjust the lengths of the beltsto. The present invention also makes it possible to prevent vibration during elevation or lowering and to allow the beltstoto stand long use.

Overhead travelling carriage

A centering memberis pressed downward using an elastic member; the centering memberis provided at the bottom of a platform. A platereceiving an upper end of the elastic memberis positioned high while the platformis elevating. The plateis positioned low after the platformhas been completely elevated. While the platformis elevating or lowering, a pressing force on the centering memberis reduced. After the platformhas been completely elevated, the pressing force is weakened. The present invention suppresses vibration of the platform having been completely elevated. The present invention also prevents the article from exerting a strong upward force on the platform via a pressing member when the article is loaded or unloaded.

Then an end effecter is used to operate a heavy object, a large bending moment may act on arms of a manipulator to bend them. Consequently, an operating section cannot precisely control positions. Thus, according to the present invention, three armsare attached to a base section, each of the armsbeing composed of a first link sectionhaving one end connected to a rotating shafton the base sectionand a second link sectionconnected to the first link sectionvia another rotating shaft. These armssupport an operating section. The second link sectionis connected to the rotating shaftand to the operating sectionusing universal jointsandDirect acting driving meansis composed of a driving shaftand a driving source that advances and retreats the driving shaftThe driving shaftis driven to advance and retreat to move the operating sectionto a desired position. In this case, the operating sectionis always kept parallel with a particular plane. Loads on the operating sectionact in the axial directions of the driving shaftsThis prevents the driving shaftsfrom being bent or deformed, thus enabling precise positional control.

Parallel link manipulator and its control device

An automatic winder that enables the number of yarn-supplying-bobbin feeding devices to be increased easily. In an automatic winder comprising an ejection passage formed therein for ejecting a bobbin conveying medium (a tray T) with a bobbin placed thereon and a feeding passage formed therein for supplying the bobbin conveying medium, the automatic winder having a plurality of installation spaces S in each of which a single winding unit U can be installed, wherein a yarn-supplying-bobbin feeding device that is compatible with the winding unit U in terms with mounting dimensions is installed in an arbitrary installation space S while the winding unit U is installed in each of the other installation spaces S so that the bobbin conveying medium ejected from the winding unit U can be received by the yarn-supplying-bobbin feeding device via the ejection passage while the bobbin conveying medium can be supplied from the yarn-supplying-bobbin feeding device to the winding unit U via the feeding passage . The number of yarn-supplying-bobbin feeding devices can be increased easily, so that for example, the number of yarn types handled by a single automatic winder can be changed easily.

Growing community of inventors

Nagaokakyo, Japan

Yoichi Nakamura