Tokyo Electron Limited

Yoichi Nakagomi

Kunihiro Furuya

Shinji Iino

Toshihiro Yonezawa

Satoshi Sano

Hiroshi Tsukada

Hidehito Yokomori

Ken Inoue

A temperature managing apparatus according to the invention comprises cooling jackets provided in each of a plurality of test containers, a tank for storing a cooling medium for the cooling jackets, first pumps, second pump, constant pressure valves for making constant the amount of the transferred cooling medium, and a heat exchanger. The tank has partitions that are horizontally and vertically movable. The partitions partition the interior of the tank into a first storage area, a second storage area, and a third area interposed therebetween.

Temperature managing apparatus for multi-stage container

A temperature measuring unit of a wafer chuck measures the temperature of a wafer chuck when the wafer chuck holding a wafer W making in-unison contact with a contactor is made to contact a bottom jacket and the bottom jacket controls the wafer W to a specific test temperature. At least three recessed sections are formed in the back of the wafer chuck in such a manner that they have a depth extending from the back of the chuck to the vicinity of its surface. Through holes corresponding to the recessed sections are made in the bottom jacket. Temperature sensors that can be inserted into the through holes and in the recessed sections are provided on the side opposite to the wafer chuck of the bottom jacket. The sensors are supported by springs. During a test, the tips of the temperature sensors are caused to make elastic contact with the recessed sections.

Semiconductor wafer holder with spring-mounted temperature measurement

Method and apparatus for probe testing substrate

Growing community of inventors

Yamanashi-ken, Japan

Yoichi Nakagomi