Seiko Epson Corporation

Yoichi Naganuma

Motoki Takabe

Eiju Hirai

Yuma Fukuzawa

Shotaro Tamai

Toshiaki Hamaguchi

Shohei Mizuta

Shunya Fukuda

Katsutomo Tsukahara

Akira Miyagishi

Munehide Saimen

Masao Nakayama

Kazuaki Uchida

Shingo Tomimatsu

Hitoshi Takaai

Yoshinao Miyata

Shunsuke Watanabe

Naoto Yokoyama

Takeshi Saito

Daisuke Yamada

Yoshihiro Hokari

Shuichi Tanaka

Toshihiro Shimizu

Yasuyuki Matsumoto

Akinori Taniuchi

Naohiro Nakagawa

Sosuke Yamasaki

A liquid ejecting head includes a pressure chamber substrate having a pressure chamber, a drive element, a communication substrate having a supply communication flow path communicating with the pressure chamber and a nozzle communication flow path communicating with the pressure chamber and communicating with a nozzle for ejecting a liquid at a position different from the supply communication flow path, and a coupling substrate disposed between the pressure chamber substrate and the communication substrate, the coupling substrate having a supply port located between the pressure chamber and the supply communication flow path and a discharge port located between the pressure chamber and the nozzle communication flow path, in which a flow path cross-sectional area of the supply port is smaller than a flow path cross-sectional area of the supply communication flow path, and the coupling substrate is made of a photosensitive resist film.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head includes a pressure chamber substrate having a pressure chamber, a drive element, a communication substrate having a supply communication flow path and a nozzle communication flow path at a position different from the supply communication flow path, and a coupling substrate having a supply port and the supply communication flow path and a discharge port, in which the pressure chamber substrate has a partition wall, and the communication substrate includes a first region bonded to the coupling substrate and overlapping the pressure chamber between the supply communication flow path and the nozzle communication flow path when viewed in a thickness direction, and a second region bonded to the coupling substrate and overlapping the partition wall at a position adjacent to the first region via an opening of the supply communication flow path when viewed in the thickness direction of the pressure chamber substrate.

A liquid ejecting head includes: a pressure chamber; a piezoelectric element that generates energy for applying pressure to an ink in the pressure chamber; a nozzle channel that extends in the X-axis direction and communicates with a nozzle for ejecting the ink; a supply communication channel which enables the pressure chamber and the nozzle channel to communicate with each other; a discharge communication channel which communicates with the nozzle channel; a wiring substrate electrically coupled to a drive circuit that drives the piezoelectric element; and a wiring section that electrically couples the wiring substrate and the piezoelectric element, in which, as viewed in the Z-axis direction orthogonal to the X-axis direction, the wiring section is provided at a position at which the wiring section overlaps the nozzle channel, and the wiring section extends in the ±Q direction, which differs from the X-axis direction.

A liquid ejecting head includes a first pressure compartment extending in a first direction; a second pressure compartment extending in the first direction; a first communication passage continuous from the first pressure compartment and extending in the first direction; a second communication passage continuous to the second pressure compartment and extending in the first direction; a third communication passage continuous from the first communication passage and extending in a second direction intersecting with the first direction; a fourth communication passage continuous to the second communication passage and extending in the second direction; a fifth communication passage continuous from the third communication passage and continuous to the fourth communication passage and extending in the first direction; and a nozzle provided on the fifth communication passage.

A liquid ejecting head includes: a first pressure chamber that applies pressure to a liquid; a second pressure chamber that applies pressure to the liquid; a nozzle channel that extends in a first direction and includes a nozzle that ejects the liquid; a first communication channel that extends in a second direction crossing the first direction and enables the first pressure chamber and the nozzle channel to communicate with each other; a second communication channel that extends in the second direction and enables the second pressure chamber and the nozzle channel to communicate with each other; and a first branch channel that has a portion extending in the first direction and enables the first pressure chamber and the nozzle channel to communicate with each other through a path different from a path of the first communication channel.

The nozzle channel includes a first portion that extends in the first direction and communicates with the first communication channel and a second portion that extends in a third direction crossing the first direction and orthogonal to the second direction and communicates with the first portion, and an angle formed between the first direction and the third direction is larger than 0&#xb0; and smaller than 90&#xb0;.

Wall surfaces of the nozzle channel include a first wall surface which extends in the first direction and in which the nozzle is provided and a second wall surface which extends in the first direction and is opposite to the first wall surface, wall surfaces of the first communication channel include a third wall surface which extends in the second direction and a distance from which to the nozzle in the first direction is longest and a fourth wall surface which extends in the second direction and is opposite to the third wall surface, and a fifth wall surface which extends in a third direction set between the first direction and the second direction is provided between the second wall surface and the fourth wall surface.

a first sloped portion that is provided between the first wall surface and the third wall surface includes a first constituting surface that extends in a third direction between the first direction and the second direction.

A liquid ejecting head including: an individual flow path row in which a plurality of individual flow paths communicating with a nozzle that ejects a liquid in a first axis direction are arranged in parallel along a second axis orthogonal to a first axis, and a first common liquid chamber communicating with the plurality of individual flow paths, in which each of the plurality of individual flow paths has a pressure chamber that stores a liquid.

Liquid ejecting head and liquid ejecting system

Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.

MEMS device, liquid ejecting head, liquid ejecting apparatus, manufacturing method of MEMS device, manufacturing method of liquid ejecting head, and manufacturing method of liquid ejecting apparatus

the nozzle channel includes a first portion that extends in the first direction and communicates with the first communication channel and a second portion that extends in a third direction crossing the first direction and orthogonal to the second direction and communicates with the first portion, and an angle formed between the first direction and the third direction is larger than 0&#xb0; and smaller than 90&#xb0;.

Provided is a liquid discharging head including: a nozzle discharging a liquid; a chamber plate having a plurality of pressure chambers, a drive element provided to correspond to each of the pressure chambers, and a plurality of lead electrodes for supplying an electric signal to the drive element; and a circuit substrate having a terminal coupled to the lead electrode. A first pressure chamber and a second pressure chamber communicate with the nozzle in common. The chamber plate includes a first individual lead electrode for the drive element corresponding to the first pressure chamber and a second individual lead electrode for the drive element corresponding to the second pressure chamber. The terminal of the circuit substrate is coupled so as to overlap the first individual lead electrode and the second individual lead electrode in plan view.

Liquid discharging head and liquid discharging apparatus

Provided is a liquid discharging head including a nozzle discharging a liquid; a chamber plate in which a plurality of pressure chambers are arranged side by side on a first surface side; and a flow path plate having a second surface formed with an opening of a communication flow path, wherein a first region of a partition wall between a first pressure chamber and a second pressure chamber adjacent to each other among the plurality of pressure chambers is constrained by being bonded to the second surface of the flow path plate, and a second region of the partition wall overlaps the opening of the communication flow path in plan view.

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Matsumoto, Japan

Yoichi Naganuma