Kabushiki Kaisha Motoyamaseisakusho

Osaka Sanso Kogyo Ltd.

Motoyama Eng. Works, Ltd.

Motoyama Eng. Works, Lts

Yohichi Kanno

Osamu Uchisawa

Tadahiro Ohmi

Jun Yamashima

Tadihiro Ohmi

Atsushi Ohki

Kazuhiko Satoh

Tadahiro Hatayama

Kazuhiko Sato

Sigekazu Yamazaki

Kohichi Murakami

A diaphragm valve comprises a body with an inflow passage and an outflow passage for fluid, a valve seat disposed around said inflow passage, and a diaphragm which are disposed on said valve seat and opens and closes between said inflow passage and said outflow passage, and a gas flow hole which connects said inflow passage to said outflow passage is disposed in said valve seat.

Diaphragm valve structure

Method and system for measuring external leakage

A manual control valve apparatus having a structure which is provided with, as a conversion mechanism, a diaphragm compressor which is held between a valve casing and a guide member, arcuate engaging grooves formed in a surface of the diaphragm presser opposite to the valve stem, and rolling elements which engage in a freely rolling manner in the engaging grooves and are supported by the lead end part of the valve stem. The bottom surfaces of the engaging grooves are made cam surfaces for causing reciprocating motion in the axial direction of the valve stem. An indicator possessing opening indicating portions indicating the rotational position of the valve stem is attached to the opposite end of the guide member from the valve casing, and furthermore, windows exposing the opening support portions are provided in an area from the circumferential wall of the handle to the end wall thereof. Using this structure, it is possible to compactly incorporate an indicator indicating a degree of valve opening around the handle. Furthermore, the structure of the conversion mechanism is simplified and can be miniaturized, so that it is possible to incorporate the conversion mechanism within the guide member.

Diaphragm-type flow control valve and manual control valve apparatus

A supply control apparatus for semiconductor process gasses which is capable of accurately switching the timing of the supply state of the gasses flowing in accordance with the open or closed states of a plurality of gas pressure operated valves, which operate in response to a plurality of electromagnetic valves operating in time series. The content volumes of a plurality of gas tubes respectively connecting the plurality of electromagnetic valves to the plurality of drive units of the gas pressure operated valves are determined as a function of the length of time elapsed between the application of the control signal and the time the special gas is supplied to a process unit. The apparatus permits accurate switching of the supply state of the special gasses and avoids the mixing of the semiconductor process gasses.

Supply control system for semiconductor process gasses

A metal diaphragm valve comprises a valve cage, a metallic valve seat integral with the valve cage, a metal diaphragm having a peripheral edge portion supported in a liquid-tight manner by the valve cage and a central portion facing the valve to touch and leave the seat, a drive member for opening and closing the metal diaphragm, and a diaphragm pressing member interposed between the drive member and the metal diaphragm and adapted to press the diaphragm against the valve seat at a uniform sealing pressure.

Metal diaphragm valve

A metal diaphragm valve in which the interior of a valve casing is divided, by means of a metal diaphragm, thereby defining a valve chamber. Inlet hole and outlet hole are connected to the valve chamber. A valve seat is provided between the inlet and outlet holes, inside the valve chamber. A valve disk adapted to rest on the valve seat, is formed integrally with the diaphragm. The valve disk is driven by a drive unit disposed outside of the valve chamber, to open or close the valve.

Growing community of inventors

Sendai, Japan

Yohichi Kanno