Sony Semiconductor Solutions Corporation

Sony Corporation

Yohei Hiura

Shigetaka Mori

Nobutoshi Fujii

Koichiro Zaitsu

Shuji Manda

Naohiko Kimizuka

Shinichi Miyake

Keiji Ohshima

Keiichi Nakazawa

Hirofumi Yamashita

Junpei Yamamoto

Hidetoshi Oishi

Shinji Nakagawa

Shintaro Okamoto

Ryo Ogata

Tatsuki Miyaji

Yui Yuga

Yasushi Hamamoto

Tomoki Kambe

There is provided a solid-state imaging device including: a first semiconductor layer including a photoelectric converter and an electric charge accumulation section for each pixel, the electric charge accumulation section in which a signal electric charge generated in the photoelectric converter is accumulated; a pixel separation section that is provided in the first semiconductor layer, and partitions a plurality of the pixels from each other; a second semiconductor layer that is provided with a pixel transistor and is stacked on the first semiconductor layer, the pixel transistor that reads the signal electric charge of the electric charge accumulation section; and a first shared coupling section that is provided between the second semiconductor layer and the first semiconductor layer, and is provided to straddle the pixel separation section and is electrically coupled to a plurality of the electric charge accumulation sections.

Solid-state imaging device

The present disclosure relates to a semiconductor device, a method for manufacturing a semiconductor device, and a plasma-induced damage (PID) protection device capable of, without increasing a chip area, releasing a large PID with high efficiency and protecting an element to be protected from the PID with higher accuracy. There are provided a protection metal-oxide-semiconductor field-effect transistor (MOSFET) that includes a drain connected to a gate electrode of a MOSFET to be protected and a grounded source and protects the MOSFET to be protected from a plasma-induced damage (PID), and a dummy antenna connected to a gate electrode of the protection MOSFET, the dummy antenna turning on the protection MOSFET prior to the MOSFET to be protected due to PID charge. The present disclosure can be applied to a semiconductor device.

Semiconductor device, method for manufacturing semiconductor device, and PID protection device

Provided is a semiconductor device, a measurement device, a measurement method, and a semiconductor system that enable accurate measurement of the plasma induced damage (PID) effect on a small scale. The semiconductor device includes an NMOSFET whose gate is connected to an antenna part that functions as an antenna in a plasma process and a PMOSFET that controls the connection between the NMOSFET and a ring oscillator. The semiconductor device is provided with a test element group (TEG) that includes an NMOSFET whose gate is connected to an antenna part that functions as an antenna in a plasma process and a PMOSFET that controls the connection between the NMOSFET and a ring oscillator.

Semiconductor device, measurement device, measurement method, and semiconductor system for plasma induced damage (PID) measurement

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Kanagawa, Japan

Yohei Hiura