Asahi Kasei Emd Corporation

Asahi Kasei Microdevices Corporation

Sentron Ag

Yo Yamagata

Masaya Yamashita

Ken Tanaka

Robert Racz

Radivoje S Popovic

Makoto Kataoka

Katsumi Kakuta

Norihiko Mikoshiba

Koji Shibahara

Yuichi Kanayama

The present invention relates to a magnetic sensor and a magnetic detecting method of the same capable of detecting at least a magnetic field perpendicular to a substrate and a magnetic field parallel to the substrate in a state where the respective magnetic field components are mixed. One embodiment of the magnetic sensor detects a magnetic field of the orthogonal three axes, and includes a magnetic detector including a magnetic field sensitive material configured to detect a magnetic field component in a first direction, a magnetic field direction converters configured to convert a magnetic field component in a second direction and a magnetic field component in a third direction into magnetic field components in the first direction, the second direction being perpendicular to the first direction, the third direction being perpendicular to both of the first and the second directions.

Magnetic sensor and magnetic detecting method of the same

The present invention relates to a magnetic sensor with a sensitivity measuring function and a method thereof. Magnetic sensitivity surfaces detect flux density, and a switching unit extracts magnetic field intensity information of each axis, and inputs it to a sensitivity calculating unit. The sensitivity calculating unit calculates the sensitivity from the magnetic field intensity information about the individual axes from the magnetic sensitivity surfaces. The sensitivity calculating unit includes an axial component analyzing unit for analyzing the flux density from the magnetic sensitivity surfaces into magnetic components of the individual axes; a sensitivity decision unit for deciding the sensitivity by comparing the individual axial components of the magnetic field intensity from the axial component analyzing unit with a reference value; and a sensitivity correction unit for carrying out sensitivity correction in accordance with the sensitivity information from the sensitivity decision unit.

Magnetic sensor and sensitivity measuring method thereof

The present invention relates to a magnetic sensor with which magnetic characteristics are made extremely stable by consideration of an area of contact of a base layer of a magnetic substance and a semiconductor substrate. On a semiconductor substrate () a plurality of Hall elements () are embedded so as to be coplanar to a top surface of the semiconductor substrate while being mutually spaced apart by a predetermined distance, and above the Hall elements and the semiconductor substrate, a base layer (), having coefficient of thermal expansion differing from that of the Hall elements and partially covers a region of each Hall elements, is formed via a protective layer (), and a magnetic flux concentrator (), having an area larger than the base layer and with magnetic amplification, is formed on the base layer. An area of contact of the base layer of the magnetic substance and the semiconductor substrate is made small to lessen the generation of an offset voltage.

Magnetic sensor and method of manufacturing thereof

A low-cost, current sensor suitable for mass production and a manufacturing method thereof are provided. The current sensor is small with high sensitivity and can be packaged in a standard assembly line which is normally used when an integrated circuit is manufactured. Further, it is possible to obtain a sufficient shielding effect against a disturbance flux without degrading the detecting sensitivity of a flux. A first magnetic materialis bonded to the lower part of a current conductorC. The first magnetic materialhas the function of converging and amplifying a fluxgenerated by the current to be measured. A second magnetic materialis bonded above a magnetic sensor chip. The second magnetic materialhas a shielding function against a disturbance flux entering from the outside.

Current sensor and current sensor manufacturing method

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Tokyo, Japan

Yo Yamagata