Sony Precision Technology Inc.

Yo Saito

Hiroshi Kondo

Masatsugu Okuyama

An image of an inspection object is picked up by an image pickup unit, and a characteristics quantity of an image of a defect part extracted by a defect extracting unit is extracted and digitized by a characteristics extracting unit. A database preparing unit regroups defects having similar characteristics by a defect classification unit on the basis of the characteristics information digitized by the characteristics extracting unit with respect to defects belonging to a defect group selected and designated by an operator via a display/input unit, and prepares on a database memory a database in which the defects of the inspection object are hierarchically classified. A classification executing unit hierarchically classifies the defects of the inspection object with reference to the database provided by the database preparing unit on the basis of the digitized characteristics information extracted by the characteristics extracting unit from the image of the defect part of the inspection object extracted by the defect extracting unit. Thus, a defect classification/inspection system having high classification accuracy is provided.

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Kanagawa, Japan

Yo Saito