Samsung Electronics Co., Ltd.

Yll-Seug Park

Hee-Sun Chae

Seok-Hyun Kim

Seung-hoon Tong

Jae-Seok Oh

Tae-Yang Yoon

Dae-Sik Cho

Hee-Se Kang

Doh-Soon Kwak

A lot dispatching method and system for variably applying the most suitable processing equipment and/or processing condition in a succeeding process of a semiconductor manufacturing process, wherein the succeeding process is influenced by the result of a preceding process. A lot processed by the preceding process is dispatched to the succeeding processing equipment according to a systematic analysis result obtained from a relationship between a process result of the preceding process and an efficiency and the characteristics of a plurality of processing equipment in the succeeding process. A plurality of process conditions for the succeeding process corresponding to the performance of the preceding process is provided. A respective process condition has characteristics that minimize the difference in performance in the succeeding process from a desired or target performance. By systematically analyzing the quality of the lot waiting to be dispatched, the succeeding process is performed with the most suitable process condition.

Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same

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Kyunggi-do, South Korea

Yll-Seug Park