Taiwan Semiconductor Manufacturing Comp. Ltd.

Yj Wang

Kun-Ming Huang

Fu-Hsin Chen

Tzu-Yang Wu

Eugene Chu

Ying-De Chen

A capacitor structure which has generally pyramidal or stepped profile to prevent or reduce dielectric layer breakdown is disclosed. The capacitor structure includes a first conductive layer, at least one dielectric layer having a first area provided on the first conductive layer and a second conductive layer provided on the at least one dielectric layer. The second conductive layer has a second area which is less than the first area of the at least one dielectric layer. A method of fabricating a capacitor structure is also disclosed.

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Hsin-Chu, Taiwan

Yj Wang