Lumotive, LLC

Applied Materials, Inc.

Yizhak Sabba

Gleb M Akselrod

Erik Edward Josberger

Mark C Weidman

Tyler Williamson

Xianmin Tang

Feng Chen

Tae Hong Ha

Zhiyuan Wu

Wenjing Xu

Gang Shen

According to various embodiments, a tunable optical device comprises a tunable optical metasurface on a substrate with an integrated driver circuit. In some embodiments, the tunable optical device includes a photon shield layer to prevent optical radiation from disrupting operation of the driver circuit. In some embodiments, the tunable optical device includes a diagnostic circuit to detect and disable defective optical structures of the metasurface. In some embodiments, the tunable optical device includes an integrated heater circuit that maintains a liquid crystal of the metasurface above a minimum operating temperature. In some embodiments, the tunable optical device includes an integrated lidar sequencing controller, a steering pattern subcircuit, and a photodetector circuit.

Tunable optical devices with integrated active switch-matrix driver circuits

Described are microelectronic devices comprising a dielectric layer formed on a substrate, a feature comprising a gap defined in the dielectric layer, a barrier layer on the dielectric layer, a two metal liner film on the barrier layer and a gap fill metal on the two metal liner. Embodiments provide a method of forming a microelectronic device comprising the two metal liner film on the barrier layer.

Binary metal liner layers

Integrated driver and heat control circuitry in tunable optical devices

Integrated driver and self-test control circuitry in tunable optical devices

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Irvine, CA, United States of America

Yizhak Sabba