Analog Devices,inc.

Yingqi Jiang

Kuang L Yang

Qian Zhang

Techniques are described for forming a sealed cavity within a semiconductor wafer, where a conductor wafer includes a structure, such as a T-gate electrode or passive component, formed over a substrate. The sealed-cavity structure may be embedded into the wafer without interfering with any subsequent processes. That is, once the cavity is closed, any subsequent backend processes may continue as usual.

Method of forming a sealed cavity embedded in a semiconductor wafer

An exemplary energy harvester includes a piezoelectric diaphragm, an eccentric mass that rotates in response to external motion, and a piezoelectric stress inducer coupled with the eccentric mass and the piezoelectric diaphragm. The piezoelectric stress inducer deforms the piezoelectric diaphragm in response to rotational motion of the eccentric mass, causing the piezoelectric diaphragm to generate electrical energy.

Piezoelectric energy harvester for human motion

A battery housing can include a first chamber configured to receive a first electrode material, the first chamber bounded at least in part by a first inflatable casing. The battery housing can include a second chamber configured to receive a second electrode material, the second chamber bounded at least in part by a second inflatable casing. An ionically conductive partition can be disposed between the first and second chambers. A first electrical contact can be coupled to or formed with the first inflatable casing. A second electrical contact can be coupled to or formed with the second inflatable casing. The first inflatable casing can be configured to inflate in response to an injection of the first electrode material into the first chamber. The second inflatable casing can be configured to inflate in response to an injection of the second electrode material into the second chamber.

Battery housing

A super-capacitor has a substrate, at least two porous electrodes integrated within the substrate, and an electrolyte extending between the at least two porous electrodes. The electrolyte is integrated with the substrate, and is positioned within the substrate. The at least two porous electrodes and electrolyte are configured to store charge as a super-capacitor.

Integrated super-capacitor

A method of fabricating a super-capacitor provides a substrate, and then adds an electrode and electrolyte template film, having a well for receiving the electrode, to the substrate. The method also adds a second electrolyte to the electrode and electrolyte template.

Method of producing a super-capacitor

An electric energy scavenger device has a housing forming an internal chamber with an internal wall, and a movable element contained within the internal chamber. The movable element is freely movable and unconnected to any other movable element within the internal chamber. Within the internal chamber, the device also has a plurality of piezoelectric charge conversion elements positioned along the internal wall. The plurality of piezoelectric charge conversion elements are positioned side-by-side to contact the movable element when the movable element moves within the internal chamber. In addition, the movable element is configured to simultaneously contact at least two of the plurality of side-by-side piezoelectric charge conversion elements. During use, the movable element is freely movable within the internal chamber in response to movement of the entire housing.

Electric energy scavenger device

A method of producing a super-capacitor provides a first substrate having a first base, forms a first electrode on the first substrate, and forms a separator so that the electrode is between the first base and the first separator. The method also micromachines holes through the separator, forms a chamber, and adds electrolyte, having ions, to the chamber. The electrolyte is in contact with the first electrode within the chamber. In addition, the holes are sized to permit transmission of the ions of the electrolyte through the holes.

Growing community of inventors

Bedford, MA, United States of America

Yingqi Jiang