Carl Zeiss Meditec Gmbh

Kla-tencor Technologies Corporation

Yingjian Wang

Mehdi Vaez-Iravani

Andrew V Hill

Homayoun Bagherinia

Yuval Ben-Dov

Hans J Hansen

Zheng-wu Li

Courosh Mehanian

Kurt Zimmermann

An apparatus and a method are described which provide a range of second-order chromatic dispersion correction between a reference arm and a sample arm of an optical coherence tomographic system, while minimizing optical path length differences.

Methods and systems for modifying second-order chromatic dispersion in optical coherence tomographic systems

Systems and methods are presented which allow the detection of the presence, type, and misalignment of optical components in the optical train of an optical coherence tomographic instrument to be determined from the use of OCT depth information.

Apparatus and methods for detecting optical components and their misalignment in optical coherence tomographic systems

A system is provided herein for inspecting a specimen. In one embodiment, the system may include a dual-channel microscope, two illuminators, each coupled for illuminating a different channel of the dual-channel microscope and two detectors, each coupled to a different channel of the dual-channel microscope for acquiring images of the specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. In one embodiment, the channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators, so that they produce light in two substantially non-overlapping spectral ranges. In another embodiment, the channels of the dual-channel microscope may be spatially separated by positioning the two detectors, so that the illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system.

Systems and method for simultaneously inspecting a specimen with two distinct channels

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Fremont, CA, United States of America

Yingjian Wang