Samsung Electronics Co., Ltd.

Yinghu Xu

Dongwon Kim

Seok Heo

Sungyong Park

Beomsoo Hwang

Jongkyu Kim

Minyoung Kim

Yi Jin

Ansook Sul

Wonguk Seo

Kyeongsup Byeon

Byungjun An

Jinho So

Hongju Kim

Inwook Koo

A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.

Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same

A chemical solution vaporization device includes a chemical solution tank including chemical solution vaporization rooms, a chemical solution sensing room, and a chemical solution supply room. A first internal wall separating the plurality of chemical solution vaporization rooms from each other includes a first opening at a lower portion thereof. A second internal wall separating at least one of the plurality of chemical solution vaporization rooms from the chemical solution supply room includes a second opening at a lower portion thereof. A third internal wall separating at least one of the plurality of chemical solution vaporization rooms from the chemical solution sensing room includes a third opening at a lower portion thereof. And a lower portion of a fourth internal wall separating the chemical solution sensing room from the chemical solution supply room is combined with the lower wall.

Chemical solution evaporation device and substrate processing device including the same

Growing community of inventors

Suwon-si, South Korea

Yinghu Xu