V Technology Co., Ltd.

YingBao Yang

Michinobu Mizumura

Jun Gotoh

Yoshihiro Shioaku

A first laser irradiation, in which an amorphous silicon film is irradiated with a first laser beam for transformation of the amorphous silicon film to a microcrystalline silicon film, and a second laser irradiation, in which a second laser beam moves along a unidirectional direction with the microcrystalline silicon film as a starting point for lateral crystal growth of growing crystals constituting a crystallized silicon film, are carried out to form a microcrystalline silicon film and a crystallized silicon film alternately along the unidirectional direction.

Growing community of inventors

Kanagawa, Japan

YingBao Yang