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Kern Energy Enterprise Co., Ltd.

Yoshimura, Toshiaki

Ying-Shih Hsiao

Toshiaki Yoshimura

The heat treating furnace for the gas reaction includes an outer body, an inner body, a heating mechanism, gas supplying mechanism, and a controller. Using the controller to control the amount of gas supply effectively keeps the first pressure (P) in the gas circulation chamber outside the inner body greater than the second pressure (P) in the reaction chamber inside the inner body all the time. In this way, the flow rate of gas inlet, reaction rate, cooling rate can be facilitated, and the uniformity of the thin film and the operational safety can be improved.

Growing community of inventors

Taipei, Taiwan

Ying-Shih Hsiao