Guangdong University of Technology

Ying Long

Chengyong Wang

Qimin Wang

Shanghua Wu

The present invention provides an AlOcoated SiNcutting tool comprising a SiNbased substrate body and a coating layer on the substrate body, wherein the coating layer has at least one AlOcoating layer consisting of amorphous AlOor nanocrystalline &#x3b1;-, &#x3b3;-, or &#x3ba;-AlO. The hard and wear resistant refractory coating is deposited onto the SiN-based substrate body by reactive sputtering using bipolar pulsed DMS technique or dual magnetron sputtering method at substrate temperatures of 300-700&#xb0; C. During the deposition, preferably, the substrate temperature is controlled to achieve the desired crystal structure of the coating. To form amorphous AlOcoating on the surface of the substrates, the deposition temperature can be controlled from 300 to 500&#xb0; C.; on the other hand, to form nanocrystalline &#x3b1;-, &#x3b3;-, or &#x3ba;-AlO, the deposition temperature can be controlled in the range of 500-700&#xb0; C. The coated cutting tools of the present invention are suitable for high-speed machining of metals by turning, milling, drilling or by other similar chip-forming machining methods.

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Guangdong, China

Ying Long