Tsinghua University

Ying-Jen Chen

Chen-Fu Chien

Chia-Yu Hsu

Kuo-Hao Chang

Disclosure is a method of dispatching semiconductor batch production, including: measuring an actual line width to calculate an estimated value of line width bias reference level, an estimated value of product bias, an estimated value of chamber bias and a standard error of chamber bias, and storing in a historical data module; inputting a product category, a line width measurement before manufacturing and a target line width after manufacturing in a batch production module; calculating a similarity index of each chambers by a computing engine of a matching module according to the data stored in the historical data module; transforming the similarity index into a priority of machine allocation by a dispatching module and dispatching a production machine; updating the historical data module by measuring a line width after manufacturing. The line width bias generated by various variations will be eliminated during the manufacturing process.

Method of dispatching semiconductor batch production

A method for classifying defect images is provided. Defect images are processed through an automatic optical detection. The present invention integrates image analysis and data mining. Defects are found on the images without using human eye. The defects are classified for reducing product defect rate. Thus, the present invention effectively enhances performance on finding and classifying defects with increased consistency, correctness and reliability.

Growing community of inventors

Hsinchu, Taiwan

Ying-Jen Chen