University of Electronic Science and Technology of China

Ying Duan

Chao Wang

Jing Jiang

Zezhan Zhang

Xueke Gou

Jun Hu

Yueming Wang

Fei Wang

Yang Yang

Yi Niu

Peifeng Yu

Anmei Qiu

Hongchuan Jiang

Jiexiong Ding

Li Du

Congjun Wu

Yekui Zhong

Shan Gao

Guiyun Tian

Pei Huang

Chengui Zhang

Jinguang Lv

Jingqiu Liang

Xianfu Liu

Xiaojiang Shi

Bing Xiong

Yuehai Zhang

Huiyuan Geng

A device for measuring surface temperature of a turbine blade based on a rotatable prism includes a probe, a prism rotating apparatus and an optical focusing apparatus. The prism rotating apparatus and the optical focusing apparatus are located inside the probe. The probe includes a probe outer casing, a probe inner casing, a water-cooled casing pipe, a sapphire window piece, a quartz prism, a light pipe, a collimating lens, a focusing lens and an infrared array detector. The prism rotating apparatus includes a rotary motor, a worm, a gear and a prism rotary table, the rotary motor rotates to drive the prism rotary table to rotate. The optical focusing apparatus includes a telescopic motor, a coupler, a lead screw and a drive rod, the telescopic motor rotates to drive the lead screw, so as to further drive the drive rod to move along the slot.

Device for measuring surface temperature of turbine blade based on rotatable prism

The present invention discloses a method of measuring longitude deformation of blades. The radiation and rotation speed of the blade are collected by an optical probe and a synchronized rotation sensor. The stretch of the blade is able to be determined by the obvious change in the light intensity detected by the optical probe. The precision servo motor keeps driving the optical probe to move upward. The collected radiation is compared with the radiation collected on the previous point. The stretch of the blade is calculated based on position of the blade tip which is determined by the time when the high level radiation from the blade is disappeared. The longitude deformation of the blade is calculated by plugging the stretch into the deformation equation. Mapping the calculated deformation with the number of the blade calculated with rotation speed synchronizing signals to achieve the deformation of all the blades.

Method of measuring longitude deformation of blades by differential radiation between blades and casing

The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

Device and method for measuring film longitudinal temperature field during nitride epitaxial growth

A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system provided by the present invention has the resolution better than 1 &#x3bc;m, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

Real-time monitoring microscopic imaging system for nitride MOCVD epitaxial growth mode

An infrared temperature-measurement probe, including: a probe housing; a reflector; and a reflector adjusting mechanism. The probe housing includes an inner wall, an outer wall, a cooling channel sandwiched between the inner wall and the outer wall, a chamber surrounded by the inner wall, and a light transmission hole communicating with the chamber. The reflector includes a mirror and a mirror frame. The reflector adjusting mechanism includes a motion controller, a drive coupling, and three control rods. The reflector and the three control rods are disposed in the chamber of the probe housing. The motion controller is disposed outside the chamber of the probe housing. The drive coupling is disposed between the motion controller and the three control rods, and the motion controller is adapted to move each of the three control rods via the drive coupling. The mirror is imbedded in and is supported by the mirror frame.

Infrared temperature-measurement probe

A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).

Method of collecting radiation information of turbine blade

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Sichuan, China

Ying Duan