Taiwan Semiconductor Manufacturing Comp. Ltd.

Ying Chi Wu

You-Hua Chou

Ta-Yung Lee

Chiao-Ping Cheng

One or more overhead cranes are provided. The overhead cranes include a first horizontal rail having a first end and a second end, a second horizontal rail having a third end and a fourth end, a first post connected to the first end of the first horizontal rail, a second post connected to the second end of the first horizontal rail, a third post connected to the third end of the second horizontal rail, a fourth post connected to the fourth end of the second horizontal rail and a cross member extending from the first horizontal rail to the second horizontal rail. The cross member includes a center span section, a first side arm and a second side arm. In some embodiments, the center span section is trapezoidialy shaped. In some embodiments, the overhead crane includes a vacuum system.

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Taipei, Taiwan

Ying Chi Wu