Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm Japan K.k. (2 from 194 patents)
2 patents:
1. 7655577 - Method of forming silicon-containing insulation film having low dielectric constant and low film stress
2. 7148154 - Method of forming silicon-containing insulation film having low dielectric constant and low film stress