Applied Materials Israel Limited

Yigal Kotler

Nir Baram

Riva Levit

There are provided methods and systems to automatically determine, for acquisition by an examination system, of a plurality of regions covering a plurality of dies of a specimen, along a first direction and/or along a second direction orthogonal to the first direction. The dimension of the region along the first direction is selected to enable optimizing a total level of overlap of slices acquired by the examination system to cover the plurality of regions. The dimension of the region along the second direction enables maximizing a total parallel computation power used by the examination system to process an image of each region.

Growing community of inventors

Nir Eliyahu, Israel

Yigal Kotler