Taiwan Semiconductor Manufacturing Comp. Ltd.

Mobile Drive Netherlands B.v.

Shenzhen Next Generation Communications Limited

Yi-Ming Chen

Kuo-Cheng Chen

Chih-Wei Lin

Fu-Hsien Li

Jen-Ti Wang

Zheng Lin

Cheng-Ho Hung

Chih-Chung Hsieh

Siang-Yu Siao

Ke-Jia Lin

Ming-Han Tsai

Sheng-Hsiang Chuang

Jian-Wei Chang

Yi-Kuo Chen

Guan-Cyun Li

Chiung-Min Lin

Hsi-Hsing Hsu

Yen-Ju Wei

Teng-Bang Hou

A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

System with substrate carrier deterioration detection and repair

An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Substrate carrier deterioration detection and repair

An antenna structure capable of transmitting radio waves in multiple polarizations is positioned on a circuit board. The circuit board includes upper and lower surfaces and peripheral side wall. The antenna structure includes a first antenna array, a second antenna array, and a control circuit. Each antenna unit of the first antenna array is positioned on one of the upper surface or the lower surface, a portion of each antenna unit of the second array is positioned on the peripheral side wall. The other portion of each antenna unit bended and positioned on at least one of the upper surface or the lower surface. In activating the first antenna array and the second antenna array the control circuit can generate radio transmissions in multiple polarizations. A wireless communication device is also provided.

Antenna structure and wireless communication device using the same

An antenna structure suitable for 5G use in controlling direction of radio beams and in increasing antenna gain includes a substrate, an array of antennas, a main body, a lens array, a grounding plate, and a high-impedance surface (HIS) layer embedded into the substrate. The array of antenna units is positioned on the substrate surface under the protection of the main body. The lens array includes a lens units for each antenna unit, the lens units concentrate the beams generated by the antenna units. The grounding plate is underneath and grounds the antenna units. The HIS layer suppresses surface waves generated by the lens arrays and the substrate and increases a gain of the antenna structure in certain directions.

An antenna structure serving as an emitter in a radar device with optimized isolation of signal comprises antenna array as the radiating element. The antenna array includes array units. Each array unit includes radiating units connected by a feeder. Radiation area of each radiating unit gradually decreases from a center of array unit to ends of array unit. A specified distance is defined between centers of adjacent radiating units along an extending direction of the feeder. The feeder transmits a current signal to the array units, the radiating unit emits a radar scanning beam based on the current signal.

Antenna structure for optimizing isolation of signal and electronic device using same

An antenna structure serving as a radar emitter with extended long range function comprises a radiating element comprised of radiating units connected in series by a feeder. Each two adjacent radiating units are spaced apart from each other by a specified distance. Lengths of the radiating units are same, and width of the radiating units gradually decreases from a center to ends. The feeder transmits a current signal to the radiating element. The radiating element emits a radar beam based on the current signal.

Antenna structure for extended distance radar function and electronic device using the same

A small-scale antenna structure with high gain and with controllable polarization direction includes a motherboard, an antenna array thereon, and antenna units. An array of lens units is superimposed directly over and covers the antenna units. A wireless communication device using the antenna structure is also provided. The wireless communication device includes a main body and the antenna structure. The main body receives the antenna structure.

A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.

A dual-function wafer handling apparatus for handling a wafer includes an aligner for rotating the wafer, an ID reader disposed corresponding to an edge of the wafer for reading an ID of the wafer, and an optical defect inspection unit for capturing images to analysis.

Dual-function wafer handling apparatus

An apparatus applicable to a storage container is provided and includes a filtering cartridge, a gas supply device and a particle counter. The filtering cartridge is configured to be disposed on the storage container. The filtering cartridge includes a flexible housing and a filter. The flexible housing has a first portion and a second portion opposite to the first portion. The flexible housing includes a gas inlet, a first gas outlet and a second gas outlet. The gas inlet is disposed on the first portion. The first gas outlet is disposed on the first portion. The second gas outlet is disposed on the second portion and connected to the storage container. The filter is disposed over the second gas outlet. The gas supply device is connected to the gas inlet, thereby purging gas into the flexible housing. The particle counter is connected to the first gas outlet.

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Taipei, Taiwan

Yi-Ming Chen